1. B. Smith: Resist Processing. In Microlithography: Science and Technology, ed. by J. Sheets, B. Smith (Marcel-Dekker, New York 1998)
2. D. Seeger: Solid State Technol. 40, 115 (1997)
3. B. Cohen, M. Sun: Solid State Technol. 46, 51 (2003)
4. K. El-Awady: Programmable Thermal Processing Module for Semiconductor Substrates. PhD thesis, Stanford University (2000)
5. A. Hisai, K. Kaneyama, C. Pieczulewsi: Proc. SPIE 4690, 754 (2002)