Sub-surface damage in indium phosphide caused by micromachining of grooves with femtosecond and nanosecond laser pulses
Author:
Publisher
Springer Science and Business Media LLC
Subject
General Materials Science,General Chemistry
Link
http://link.springer.com/content/pdf/10.1007/s00339-004-2962-x.pdf
Reference24 articles.
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2. A. Luft, U. Franz, A. Emsermann, J. Kaspar: Appl. Phys. A 63, 93 (1996)
3. R. Le Harzic, N. Huot, E. Audouard, C. Jonin, P. Laporte, S. Valette, A. Fraczkiewicz, R. Fortunier: Appl. Phys. Lett. 80, 3886 (2002)
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