Freestanding circular GaN grating fabricated by fast-atom beam etching
Author:
Publisher
Springer Science and Business Media LLC
Subject
General Materials Science,General Chemistry
Link
http://link.springer.com/content/pdf/10.1007/s00339-009-5376-y.pdf
Reference14 articles.
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4. A. Rosenberg, K. Bussmann, M. Kim, M.W. Carter, M.A. Mastro, R.T. Holm, R.L. Henry, J.D. Caldwell, C.R. Eddy Jr., Fabrication of GaN suspended photonic crystal membranes and resonant nanocavities on Si(111). J. Vac. Sci. Technol. B 25(3), 721 (2007)
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