Abstract
AbstractAlMgB14 coatings have been deposited by DC magnetron sputtering from elemental targets on Si (001), Al2O3 (0001) and MgO (001) substrates at temperatures in the range of 25–350 °C. The structural and mechanical properties of AlMgB14 films were characterized by X-ray diffraction, scanning electron microscopy, nanoindentation, and analyzed as a function of deposition conditions and substrate materials. The results show that all films are X-ray amorphous, and the mechanical properties of the deposited films depend on the substrate and growth temperature. AlMgB14 thin films deposited at 350 °C are found to have smoother surfaces and containing more well-formed B12 icosahedra than the films deposited at lower temperature, which consequently increase the hardness of the deposited films. The maximum hardness and Young’s modulus of the as-deposited films are about 32.3 GPa and 310 GPa, respectively, for films deposited on Al2O3 substrate at 350 °C.
Funder
Knut och Alice Wallenbergs Stiftelse
Stiftelsen Åforsk
Carl Tryggers Stiftelse för Vetenskaplig Forskning
Publisher
Springer Science and Business Media LLC
Subject
General Materials Science,General Chemistry
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