Modified Fowler–Nordheim tunnelling for modelling charge injection into Si3N4 in an Al/Si3N4/Si structure
Author:
Publisher
Springer Science and Business Media LLC
Subject
General Materials Science,General Chemistry
Link
http://link.springer.com/content/pdf/10.1007/s00339-012-7065-5.pdf
Reference38 articles.
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5. S. Kalicinski, M. Wevers, I. De Wolf, Microelectron. Reliab. 48, 1221 (2008)
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3. Investigation of Charge Injection and Relaxation in Multilayer Dielectric Stacks for Capacitive RF MEMS Switch Application;IEEE Transactions on Electron Devices;2013-07
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