Publisher
Springer Science and Business Media LLC
Subject
General Materials Science,General Chemistry
Reference16 articles.
1. The National Technology Roadmap for Semiconductors (Semiconductor Industry Association, Sematech, Austin, 2000)
2. D.A. Muller, T. Sorsch, S. Moccio, F.H. Baumann, K.E. Lutterodt, G. Timp: Nature (Lond.) 399, 758 (1999)
3. P.A. Packan: Science 285, 2079 (1999)
4. R. Degraeve, N. Pangon, B. Kaczer, T. Nigam, G. Groeseneken, A. Naem: in Tech. Dig. IEEE Symp. VLSI Technology 1999, p. 59
5. M. Balog, M. Schieber, M. Michman, S. Patai: Thin Solid Films 41, 247 (1977)
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