Practical classical molecular dynamics simulations for low-temperature plasma processing: a review
Author:
Publisher
Springer Science and Business Media LLC
Subject
General Medicine
Link
https://link.springer.com/content/pdf/10.1007/s41614-023-00140-5.pdf
Reference117 articles.
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2. M.D. Acciarri, C. Moore, S.D. Baalrud, Influence of strong Coulomb coupling on diffusion in atmospheric pressure plasmas. Plasma Sources Sci. Technol. 32(11), 115004 (2023). https://doi.org/10.1088/1361-6595/ad0743
3. D. Akbarian, K. Ganeshan, W. Woodward, J. Moore, A.C. Van Duin, Atomistic-scale insight into the polyethylene electrical breakdown: an ereaxff molecular dynamics study. J. Chem. Phys. 154(2) (2021)
4. M.P. Allen, D.J. Tildesley, Computer Simulation of Liquids (Oxford University Press, Oxford, 2017). https://doi.org/10.1093/oso/9780198803195.001.0001
5. A. Anders, Tutorial: reactive high power impulse magnetron sputtering (R-HiPIMS). J. Appl. Phys. 121(17), 171101 (2017). https://doi.org/10.1063/1.4978350
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