CO2 laser CVD of copper lines with twofold periodic structures-Reference-Cited by-同舟云学术

CO2 laser CVD of copper lines with twofold periodic structures

Published:1992-02 Issue:2 Volume:54 Page:152-157
ISSN:0721-7250
Container-title:Applied Physics A Solids and Surfaces
language:en
Short-container-title:Appl. Phys. A

Author:

Preu� S.,Stafast H.

Publisher

Springer Science and Business Media LLC

Subject

General Materials Science,General Chemistry,Physics and Astronomy (miscellaneous),General Engineering,General Materials Science

Link

http://link.springer.com/content/pdf/10.1007/BF00323902.pdf

Reference26 articles.

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