Bistabilities in pyrolytic laser-CVD of silicon and carbon

Author:

Kargl P.B.,Arnold N.,Bäuerle D.

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Cited by 9 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Fabrication of highly ultramicroporous carbon nanofoams by SF6-catalyzed laser-induced chemical vapor deposition;Chemical Physics Letters;2016-05

2. Process considerations for layer-by-layer 3D patterning of silicon, using ion implantation, silicon deposition, and selective silicon etching;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2012-11

3. 3D Free-Form Patterning of Silicon by Ion Implantation, Silicon Deposition, and Selective Silicon Etching;Advanced Functional Materials;2012-06-08

4. Instabilities and Structure Formation;Laser Processing and Chemistry;2011

5. Growth of Fibers;Laser Processing and Chemistry;2011

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