Structure and electrical properties of PMN-PZT micro-actuator deposited by tape-casting process

Author:

Jing Yang,Luo Jianbin

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. MEMS actuators for biomedical applications: a review;Journal of Micromechanics and Microengineering;2020-05-29

2. Microactuators;Smart Sensors and MEMs;2018

3. Fabrication of Pyrochlore Phase Free PMN-PZT Ceramics via the Combustion Technique;Integrated Ferroelectrics;2015-09-02

4. Microactuators: design and technology;Smart Sensors and Mems;2014

5. Influence of carbon black on slurry compositions for tape cast porous piezoelectric ceramics;Ceramics International;2011-09

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