Author:
Wu Mo,Alivov Y. I.,Morkoç Hadis
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference181 articles.
1. G.E. Moore, Daedelus 125, 55 (1964); G.E. Moore, Cramming more components onto integrated circuits. Electronics 38, 114–116 (1965)
2. P.M. Solomon, Device innovation and material challenges at the limits of CMOS technology. Annu. Rev. Mater. Sci. 30, 645–680 (2000)
3. G.D. Wilk, R.M. Wallace, J.M. Anthony, J. Appl. Phys. 89, 5243 (2001). doi: 10.1063/1.1361065
4. R.M.C. de Almeida, I.J.R. Baumvol, Surf. Sci. Rep. 49, 1 (2003). doi: 10.1016/S0167-5729(02)00113-9
5. R.M. Wallace, G.D. Wilk, High-κ dielectric materials for microelectronics. Crit. Rev. Solid State Mater. Sci. 28, 231 (2003). doi: 10.1080/714037708
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