Effect of trimethylgallium flow rate on structural and photoelectronic properties of β-Ga2O3 films prepared by MOVPE
Author:
Funder
Natural Science Foundation of Tianjin City
National Natural Science Foundation of China
Innovative Talents Promotion Plan in Tianjin
Publisher
Springer Science and Business Media LLC
Link
https://link.springer.com/content/pdf/10.1007/s10854-024-11966-1.pdf
Reference30 articles.
1. Q. Cao, L. He, H. Xiao, X. Feng, Y. Lv, J. Ma, β-Ga2O3 epitaxial films deposited on epi-GaN/sapphire (0001) substrates by MOCVD. Mater. Sci. Semicond. Process 77, 58–63 (2018)
2. A.K. Mondal, L.K. Ping, M.A. Shazni Mohammad Haniff, M.A. Mohd Sarjidan, B.T. Goh, M.A. Mohamed, Temperature dependence of ultrathin mixed-phase Ga2O3 films grown on the α-Al2O3 substrate via Mist-CVD. ACS Omega 7, 2252–2259 (2022)
3. Z. Li, T. Jiao, J. Yu, D. Hu, Y. Lv, W. Li, X. Dong, B. Zhang, Y. Zhang, Z. Feng, G. Li, G. Du, Single crystalline β-Ga2O3 homoepitaxial films grown by MOCVD. Vacuum 178, 109440 (2020)
4. P.H. Megat Abdul Hedei, Z. Hassan, H.J. Quah, Effects of post-deposition annealing temperatures in argon ambient on structural, optical, and electrical characteristics of RF magnetron sputtered gallium oxide films. J. Mater. Res. Technol. 22, 795–810 (2023)
5. T. Terasako, Y. Kawasaki, M. Yagi, Growth and morphology control of β-Ga2O3 nanostructures by atmospheric-pressure CVD. Thin Solid Films 620, 23–29 (2016)
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3