Exploration of β-(AlxGa1−x)2O3 thin films at different deposition thicknesses by magnetron sputtering-Reference-Cited by-同舟云学术

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Exploration of β-(AlxGa1−x)2O3 thin films at different deposition thicknesses by magnetron sputtering

Published:2023-06 Issue:18 Volume:34 Page:
ISSN:0957-4522
Container-title:Journal of Materials Science: Materials in Electronics
language:en
Short-container-title:J Mater Sci: Mater Electron

Author:

Zhao Tingyu,Zhao Rongli,Guo Xiang,Tan Li,Zhang Jun,Deng Chaoyong,Cui Ruirui^ORCID

Funder

Science and Technology Foundation of Guizhou Province

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Link

https://link.springer.com/content/pdf/10.1007/s10854-023-10756-5.pdf

Reference40 articles.

1. M. Higashiwaki, K. Sasaki, H. Murakami, Y. Kumagai, A. Koukitu, A. Kuramata, T. Masui, S. Yamakoshi, Semicond. Sci. Technol. 31(3), 034001 (2016)

2. S.R. Bhalerao, D. Lupo, P.R. Berger, IEEE Int. Flex. Electron. Technol. Conf. (IFETC) 1, 32–34 (2021)

3. Z.C. Yang, J.W. Wu, P.J. Li, Y.T. Chen, Y. Yan, B. Zhu, C.S. Hwang, W. Mi, J.S. Zhao, K.L. Zhang, R.X. Guo, Ceram. Int. 46(13), 21141–21148 (2020)

4. X. Li, J.G. Yang, H.P. Ma, Y.H. Liu, Z.G. Ji, W. Huang, X. Ou, D.W. Zhang, H.L. Lu, ACS Appl. Mater. Interfaces. 12(27), 30538–30547 (2020)

5. J.L. M, X.C. Xia, S. Yan, Y. Li, W.Q. Liang, J.J. Yan, X. Chen, D. Wu, X.J. Li, Z.F. Shi, ACS Appl. Mater. Interfaces. 13(13), 15409–15419 (2021)

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