Novel mode-coupling vibrations of AlN thin film bulk acoustic resonator operating with thickness-extensional mode
Author:
Publisher
Springer Science and Business Media LLC
Subject
Applied Mathematics,Mechanical Engineering,Mechanics of Materials
Link
https://link.springer.com/content/pdf/10.1007/s10483-023-3056-6.pdf
Reference33 articles.
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2. LAKIN, K. and WANG, J. Acoustic bulk wave composite resonators. Applied Physics Letter, 38(3), 125–127 (1981)
3. NAKAMURA, K., SASAKI, H., and SHIMIZU, H. ZnO/SiO2-diaphragm composite resonator on a silicon wafer. Electronics Letters, 17(14), 507–509 (1981)
4. GILL, G. S. and PRASAD, M. Development of film bulk acoustic wave resonator: a review. Sensor Letters, 14(4), 346–361 (2016)
5. NAN, T. X., LIN, H., GAO, Y., MATYUSHOV, A., YU, G. L., CHEN, H. H., SUN, N., WEI, S. J., WANG, Z. G., LI, M. H., WANG, X. J., BELKESSAM, A., GUO, R. D., CHEN, B., ZHOU, J., QIAN, Z. Y., HUI, Y., RINALDI, M., MCCONNEY, M. E., HOWE, B. M., HU, Z. Q., JONES, J. G., BROWN, G. J., and SUN, N. X. Acoustically actuated ultra-compact NEMS magnetoelectric antennas. Nature Communications, 8, 296 (2017)
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