A Role of Base Plate Jerk Feedback Scheme for Suppression of the Self Vibration in a Pneumatic Positioning Stage-Reference-Cited by-同舟云学术

A Role of Base Plate Jerk Feedback Scheme for Suppression of the Self Vibration in a Pneumatic Positioning Stage

Published:2012 Issue:2 Volume:6 Page:252-259
ISSN:1881-3054
Container-title:Journal of Advanced Mechanical Design, Systems, and Manufacturing
language:en
Short-container-title:JAMDSM

Author:

WALI Mohebullah¹,NAKAMURA Yukinori¹,WAKUI Shinji¹

Affiliation:

1. Tokyo University of Agriculture and Technology, Department of Electronic and Information Eng.

Publisher

Japan Society of Mechanical Engineers

Subject

Industrial and Manufacturing Engineering,Mechanical Engineering

Link

http://www.jstage.jst.go.jp/article/jamdsm/6/2/6_2_252/_pdf

Reference5 articles.

1. (1) H. Kinoshita, M. Kanai, K. Deguchi, and T. Saito, Air Bearing Guided High Speed XY stage, Journal of the Japan Society for Precision Engineering, Vol. 52, No. 10 (1986), pp. 1713-1718 (in Japanese).

2. Positioning of an X-Y Stage Using the Horizontal Acceleration Signal of the Base Plate

3. (3) S. Wakui, Recognition of the Base-plate Acceleration Feedback Embedded in Stage Positioning Control System, Journal of the Japan Society for Precision Engineering, Vol. 33, No. 3 (1999), pp. 239-244.

4. Realization and Application of the Base Plate Jerk Feedback in a Pneumatic Positioning Stage

5. (5) M. Wali Y. Nakamura, and S. Wakui, A Combined Control Scheme Using the Flow Disturbance Observer and Base Plate Jerk Feedback in a Pneumatic Positioning Stage, in Proceedings of SICE Annual Conference (2011), DVD-ROM, pp. 2747-2753.

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1. Positive Stage Jerk Feedback Combined with Positive Base Plate Jerk Feedback to Improve the Positioning Speed of a Pneumatic Stage;Journal of Advanced Mechanical Design, Systems, and Manufacturing;2013