Driving Voltage Reduction of a Micromechanical Optical Switch Driven by Electrostatic Force Using an S-Shaped Deformable Thin-Film Mirror

Author:

SATO Kaiji1

Affiliation:

1. Department of Mechano-Micro Engineering, Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology

Publisher

Japan Society of Mechanical Engineers

Subject

Industrial and Manufacturing Engineering,Mechanical Engineering

Reference27 articles.

1. [1] Marxer, C. and de Rooij, F. N., Micro-Opto-Mechanical 2 x 2 Switch for Single-Mode Fibers Based on Plasma-Etched Silicon Mirror and Electrostatic Actuation, IEEE/OSA Journal of Lightwave Technology, Vol. 17, No. 1 (1999), pp. 2-6.

2. [2] Syms, R. R. A., Scaling Laws for MEMS Mirror-Rotation Optical Cross Connect Switches, IEEE/OSA Journal of Lightwave Technology, Vol. 20, No. 7 (2002), pp. 1084-1095.

3. [3] Cheng, Y. C., Dai C. L., Lee C. Y., Chen P. H. and Chang P. Z., A Circular Micromirror Array Fabricated by a Maskless Post-CMOS Process, Microsystem Technologies, No. 11 (2005), pp. 444-451.

4. [4] Sadat, S. H., Kamiya, D., Bagheri, S. and Horie, M., 2 Degree-of-Freedom Spiral Micromirror Manipulator Fabrication and Spatial Mechanical Assembling, Journal of Advanced Mechanical Design, Systems, and Manufacturing, Vol. 2, No. 2 (2008), pp. 265-270.

5. [5] Guerre, R., Fahrni, F. and Renaud, P., Fast 10-µs Microelectromechanical Optical Switch inside a Planar Hollow Waveguide (PHW), IEEE/OSA Journal of Lightwave Technology, Vol. 24, No. 3 (2006), pp. 1486-1498.

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