Numerical Simulation of Boundary Condition Dependence of Mask Pattern Placement Error by Finite Difference Method in Steady State
Author:
Affiliation:
1. Department of Mechanical Engineering, Chiba University
Publisher
Japan Society of Mechanical Engineers
Subject
Industrial and Manufacturing Engineering,Mechanical Engineering
Link
https://www.jstage.jst.go.jp/article/jamdsm/7/3/7_398/_pdf
Reference10 articles.
1. (1)Chiba, A. and Okada, K., Dynamic Thermal Distortions in an X-ray Mask Membrane During Pulsed X-Ray Exposure, Japanese Journal of Applied Physics, 29, (1990), pp. 2610-2615.
2. (2)Chiba, A. and Koichi Okada, K., Dynamic Oscillation Modes Caused by a Pulsed X-Ray Exposure in an X-Ray Mask Membrane, Japanese Journal of Applied Physics, 30, (1991), pp. 3083-3087.
3. (3)Chiba, A., Dynamic In-Plane Motion of an X-Ray Mask Membrane Induced by Synchrotron Radiation Irradiation, Japanese Journal of Applied Physics, 31, (1992), pp. 2949-2953.
4. (4)Chiba, A., and Watakabe, Y., Dynamic Thermal Response of Photomasks Caused by Excimer Laser Pulse, Japanese Journal of Applied Physics, 33, (1994), pp. 341-346.
5. (5)Chiba, A., Ota, K., Hoshino, E., Ogawa, T., and Okazaki, S., Thermal In-Plane Distortion Model of Mask for Extreme Ultraviolet Lithography during Periodic Scanning Exposure, Japanese Journal of Applied Physics, 41, (2002), pp. 4091-4100.
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