Affiliation:
1. Graduate School of Engineering, Nagoya University
Publisher
Japan Society of Mechanical Engineers
Subject
Process Chemistry and Technology,Economic Geology,Fuel Technology
Reference11 articles.
1. Freund, L. B. and Suresh, S., Thin Film Materials: Stress, Defect formation and Surface Evolution (2004), Cambridge University Press.
2. Hata, S., Sakurai, J. and Shimokohbe, A., Thin Film Metallic Glasses as New MEMS Materials, 18th IEEE International Conference on Micro Electro Mechanical Systems (2005), pp.479-482.
3. Hata, S., Kato, T., Fukushige, T. and Shimokohbe, A., Integrated Conical Spring Micro Actuator, Journal of The Japan Society for Precision Engineering, Vol.69, No.3 (2003), pp.438-442 (in Japanese).
4. Inoue, A., Supercooled Metals Open Up a New World of Metallic Materials, Genryu : JST Basic Research Report, No.3 (2001), pp.25-33 (in Japanese).
5. Johansson, S., Schweitz, J., Tenerz, L. and Tirén, J., Fracture Testing of Silicon Microelements in situ in a Scanning Electron Microscope, Journal of Applied Physics, Vol.63, No.10 (1988), pp.4799-4803.