Optical property of metallic nanodot arrays fabricated by combination of nano plastic forming and thermal dewetting method
Author:
Affiliation:
1. Department of Mechanical and Control Engineering, Tokyo Institute of Technology
2. Department of Advanced Mechanical Systems Engineering, Tokyo University of Agriculture and Technology
Publisher
Japan Society of Mechanical Engineers
Link
https://www.jstage.jst.go.jp/article/transjsme/80/817/80_2014mn0272/_pdf
Reference20 articles.
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2. Chen, Z., Lei, Y., Chew, H.G., Teo, L. W., Choi, W.K. and Chim, W. K., Synthesis of germanium nanodots on silicon using an anodic alumina membrane mask, Journal of Crystal Growth, Vol.268, No.3-4 (2004), pp.560-563.
3. Hanarp, P., Kall, M. and Sutherland, D. S., Optical properties of short range ordered arrays of nanometer gold disks prepared by colloidal lithography, The Journal of Physical Chemistry B, Vol.107, No.24 (2003), pp.5768-5772.
4. Hosaka, S., Mohamad, Z., Shirai, M., Sano, H., Yin, Y., Miyachi, A. and Sone, H., Nano-dot and nano-pit arrays with a pitch of 25 nm×25 nm fabricated by EB drawing, RIE and nano-imprinting for 1 Tb/in2 storage, Microelectronic Engineering, Vol.85, No.5-6 (2008), pp.774-777.
5. Hulteen, J. C. and Van Duyne, R. P., Nanosphere lithography: A materials general fabrication process for periodic particle array surfaces, American Vacuum Society, Vol.13, No.13 (1995), pp.1553-1558.
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