Development of MEMS-based micro-force measurement system with zero-compliance mechanism
Author:
Affiliation:
1. Department of Mechanical Engineerin, Saitama University
Publisher
Japan Society of Mechanical Engineers
Link
https://www.jstage.jst.go.jp/article/transjsme/87/901/87_21-00122/_pdf
Reference17 articles.
1. Binnig, G., Quate, C.F. and Gerber, C., Atomic force microscope, Physical Review Letters, Vol.56, No.9 (1986), pp.930-933.
2. Boyden, R. P., Britcher, C. P. and Tcheng, P., Status of wind tunnel magnetic suspension research, SAE Technical Paper Series 851898 (1985), pp.1–9.
3. Esashi, M., Micromachine/MEMS, Journal of the Japan Society of Precision Engineering, Vol. 75, No. 1(2009), pp.78-79 (in Japanese).
4. Esashi, M., Hajimeteno MEMS, Morikita Publishing Co., Ltd.（2011）, pp.8-10 (in Japanese).
5. Jones, F. E. and Schoonover, R. M., Handbook of Mass Measurement (2002), pp.87-93, CRC Press.
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1. Force Measuring System with Zero-Compliance Suspension;Industrial Engineering and Management;2024-05-29
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