Gas compression and dissolution in closed end tubes by applying pressure (Liquid infiltration characteristics into fine structure by pressure)
Author:
Affiliation:
1. Department of Mechanical Engineering, Shizuoka University
2. Division of Space and Mechanical Engineering, Hokkaido University
Publisher
Japan Society of Mechanical Engineers
Link
https://www.jstage.jst.go.jp/article/transjsme/82/838/82_16-00048/_pdf
Reference14 articles.
1. De Gennes, P.-G., Brochard-Wyart, F. and Quéré, D. (translated by Okumura, K.), Capillarity and wetting phenomena: drops, bubbles, pearls, waves, Yoshioka Shoten (2003) (in Japanese).
2. Dimitrov, D. I., Milchev, A. and Binder, K., Capillary rise in nanopores: molecular dynamics evidence for the Lucas-Washburn equation, Physical Review Letters, Vol. 99 (2007), 054501.
3. Hamraoui, A. and Nylander, T., Analytical approach for the Lucas-Washburn equation, Journal of Colloid and Interface Science, Vol. 250 (2002), pp.415-421.
4. Hattori, T., Use of multiphase flows in leading-edge semiconductor-surface cleaning, Japanese Journal of Multiphase Flow, Vol. 24, No. 1 (2010), pp.13-20 (in Japanese).
5. Ogawa, Y., Cleaning technology for advanced devices beyond 20 nm node, Solid State Phenomena, Vol. 195 (2012), pp.7-12.
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