An industrial application for velocity sensor like air type anti-vibration apparatus
Author:
Affiliation:
1. Tokyo Unive. of Agriculture and Technology Dept. of Electrical Engineering
Publisher
Japan Society of Mechanical Engineers
Link
https://www.jstage.jst.go.jp/article/transjsme/81/829/81_15-00254/_pdf
Reference13 articles.
1. Canon, Exposure apparatus including an antivibration control system, United States patent 5610686(1997), pp.1-15.
2. Kanagawa academy of science and technology, Meiritz seiki co., Active isolated equipment, Unexamined patent application publication No. 2000-65128(2000), pp.1-5(in Japanese).
3. Kinbara, A., Inose, Y. and Kurosu, S., A gyroscopic vibrometer (Application to the long-period seismometry), Transactions of SICE, Vol.25, No.1(1989), pp.7-13(in Japanese).
4. Mizuno, T., Murakami, M. and Higuchi, T., Active vibration isolation system with an active dynamic vibration absorber (1st report: Proposal of new concepts), Annual meeting 6th of Japan society of mechanical engineers Kanto branch, 312 (2000), pp.83-84(in Japanese).
5. Ronte, T. and Wakui, S., A consideration of switching control based on priority of earthquake which is analyzed in observation area as far from an air type anti-vibration apparatus, Transactions of the JSME (in Japanese),Vol.80, No.811(2014), DOI:10.1299/transjsme.2014dr0047.
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