Thinning technology of MgO substrate for diamond growth by laser slicing

Author:

YAMADA Yohei1,IKENO Junichi1,SUZUKI Hideki2,NOGUCHI Hitoshi3

Affiliation:

1. Graduate School of Science and Engineering, Saitama University

2. Shin-Etsu Polymer Co., Ltd.

3. Shin-Etsu Chemical Co., Ltd.

Publisher

Japan Society of Mechanical Engineers

Reference17 articles.

1. Abe, T., Yamada, Y., Ikeno, J. and Suzuki, H., Production of glass optical devices by three-dimensional laser slicing, Journal of the Japan Society for Precision Engineering, Vol. 85, No. 5 (2019), pp. 426-431 (in Japanese).

2. Bruel, M. and Bernard Herve, B. A., Smart-cut: a new silicon on insulator material technology based on hydrogen implantation and wafer bonding, Japanese Journal of Applied Physics, Vol. 36 (1997), pp. 1636-1641.

3. Chayahara, A., Mokuno, Y., Mokuno, Tsubouchi, N. and Yamada, H., Development of single-crystalline diamond wafers, Synthesiology, Vol. 3, No. 4 (2010), pp. 272-280.

4. Gurbuz, Y., Esame, O., Tekin, I., Kang, W. P. and Davidson, L. J., Diamond semiconductor technology for RF device applications, Solid-State Electronics, Vol. 49, Issue 7 (2005), pp. 1055-1070.

5. Koizumi, S., Kamo, M. and Sato, Y., Growth and characterization of phosphorous doped {111} homoepitaxial diamond thin films, Applied Physics Letters, Vol. 71 (1997), 1065.

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