Basic characteristics of polycarbonate-based dual cantilever sensors for detecting VOC
Author:
Affiliation:
1. NMEMS Technology Research Organization
2. Shinshu University
3. Tokyo University of Agriculture and Technology
Publisher
Japan Society of Mechanical Engineers
Subject
General Medicine
Link
https://www.jstage.jst.go.jp/article/mej/1/5/1_2014mn0055/_pdf
Reference19 articles.
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2. Blom, F. R., Bouwstra, S., Elwenspoek, M. and Fluitman, J. K. J., Dependence of the quality factor of micromachined silicon beam resonators on pressure and geometry, Journal of Vacuum Science & Technology, B 10 (1992), pp.19-26.
3. Calleja, M., Tamayo, J., Johansson, A., Rasmussen, P., Lechuga, L. and Boisen, A., Polymeric cantilever arrays for biosensing applications, Sensor Letters, Vol.1 (2003), pp.1-5.
4. Datar, R., Kim, S., Jeon, S., Hesketh, P., Manalis, S., Boisen A. and Thundat, T., Cantilever sensors: Nanomechanical tools for diagnostics, MRS BULLETIN, Vol.34 (2009), pp.449-454.
5. Ikehara, T., Lu, J., Konno, M., Maeda R. and Mihara, T., A high quality-factor silicon cantilever for a low detection-limit resonant mass sensor operated in air, Journal of Micromechanics and Microengineering, Vol.17 (2007), pp.2491-2494
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