Evaluation of Fracture Toughness of Interface Crack between Thin Film and Substrate Using Laser Ultrasonic Waves

Author:

ARAI Masahiro1,HAYASHI Hisashi,MIYAKE Tatsuya,CHO Hideo

Affiliation:

1. Department of Mechanical Systems Engineering, Shinshu University

Publisher

Japan Society of Mechanical Engineers

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Reference17 articles.

1. (1) 渋谷忠弘, 于強, 白鳥正樹, 赤井武志, "ナノスクラッチ試験によるSi3N4/Cu薄膜界面損傷機構", 日本機械学会論文集(A), Vol. 71, No. 706, (2005), pp.864-890.

2. (3) 丹野誠, 小山敦博, 渋谷陽二, "押込み試験によるDLC薄膜の強度評価法の検討", 日本機械学会関西支部講演会講演論文集No. 034-1, (2003), pp.5-37-5-38.

3. (4) Ikeda, R., Uchiyama, T., Cho, H., Ogawa, T., and Takemoto, M., “An advanced method for measuring the residual stress of deposited film utilizing laser spallation technique”, Journal of Science and Technology of Advanced Material, Vol. 7, No. 1, (2006), pp.90-96.

4. (5) Ikeda, R., Tasaka, S., Cho, H., and Takemoto, M., “Evaluation of Adhesive Strength of Chemical Vapor Deposition Diamond Films by Laser Spallation”, Japanese Journal of Applied Physics, Vol. 43, No. 5, (2004), pp.3123-3126.

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