Development of a Linear-Motor-Driven Table with Hydrostatic Water Bearings : Basic Design of a Constant-Flow Hydrostatic Bearing(Machine Elements and Manufacturing)-Reference-Cited by-同舟云学术

Development of a Linear-Motor-Driven Table with Hydrostatic Water Bearings : Basic Design of a Constant-Flow Hydrostatic Bearing(Machine Elements and Manufacturing)

Published:2009 Issue:750 Volume:75 Page:454-459
ISSN:0387-5024
Container-title:Transactions of the Japan Society of Mechanical Engineers Series C
language:en
Short-container-title:Trans.JSME(C)

Author:

OKUYAMA Shigeki¹,YUI Akinori¹,KUMAGAI Masaya,KITAJIMA Takayuki¹

Affiliation:

1. Department of Mechanical Systems Engineering, National Defense Academy

Publisher

Japan Society of Mechanical Engineers

Subject

Industrial and Manufacturing Engineering,Mechanical Engineering,Mechanics of Materials

Link

https://www.jstage.jst.go.jp/article/kikaic1979/75/750/75_KJ00005360513/_pdf

Reference5 articles.

1. 1) ABE K. On the Super-Precision Double-Disk Surface Grinding of φ400-Silicon Wafer (1st report). JSPE 1999 Spring Conf.. (1999) p.671-672.

2. 2) The Japan Society for Precision Engineering ed. Precision Machining Handbook. CORONA PUBLISHING. (1992) p.1257-1269.

3. 3) AOYAMA T. Hydrostatic Bearing-Design and Application. Kogyo Chosakai Publishing. (1990) p.17-57.

4. 4) SLOCUM A. H. Precision Machine Design. Society of Manufacturing Engineering. (1992) p.559-562.

5. A Study on Linear Motion Stage Using Water-hydrostatic Bearing.

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