Development of a Linear-Motor-Driven Table with Hydrostatic Water Bearings : Design and Development of the Table System and Its Static Characteristics(Machine Elements and Manufacturing)-Reference-Cited by-同舟云学术

Development of a Linear-Motor-Driven Table with Hydrostatic Water Bearings : Design and Development of the Table System and Its Static Characteristics(Machine Elements and Manufacturing)

Published:2009 Issue:752 Volume:75 Page:1128-1134
ISSN:0387-5024
Container-title:Transactions of the Japan Society of Mechanical Engineers Series C
language:en
Short-container-title:Trans.JSME(C)

Author:

YUI Akinori¹,KUMAGAI Masaya,KITAJIMA Takayuki¹,OKUYAMA Shigeki¹,FUJITA Etsuo,SLOCUM Alexander Henry²

Affiliation:

1. Department of Mechanical Systems Engineering, National Defense Academy

2. Massachusetts Institute of Technology

Publisher

Japan Society of Mechanical Engineers

Subject

Industrial and Manufacturing Engineering,Mechanical Engineering,Mechanics of Materials

Link

https://www.jstage.jst.go.jp/article/kikaic1979/75/752/75_KJ00005579312/_pdf

Reference12 articles.

1. 1) SHIMIZU S. The Latest Trends of Machine Tool Development and their Driving Key Technology. Proc. of the 11th International machine Tool Engineers Conference, 2004. (2004) p.243-253.

2. 2) AOYAMA T. Hydrostatic bearing. Kogyo Chosakai Publishing. (1990)

3. 3) United nations. Kyoto protocol to the united nations framework convention on climate change. (1998) p.1-20.

4. 4) ABE K. Development of double-disc surface grinding machine for large scale silicon wafer. Proc. of Abrasive Technology 1998. (1998) p.112-115.

5. 6) NAKAO Y. Spindle driven by water energy for ultra precision machine tool-2nd report. Proc. of JSME annual meeting 2004. (2004) vol.14, p.311-312.

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Static characteristics of a water-lubricated hydrostatic thrust bearing with a porous land region and a capillary restrictor;Precision Engineering;2017-10

2. Development of rotary table grinding machine for large diameter Si wafers (1^st report: Performance investigation of water hydrostatic rotary table);Transactions of the JSME (in Japanese);2016

3. Development and speed control of water driven stage;Transactions of the JSME (in Japanese);2014

4. Numerical Investigation of Static and Dynamic Characteristics of Water Hydrostatic Porous Thrust Bearings;International Journal of Automation Technology;2011-11-05