Development of Multi-Degrees-of-Freedom Microscope Stage Constructed of Electromagnetic Actuator Using Rubber(Mechanical Systems)

Author:

NOMURA Kensaku1,NORITSUGU Toshiro

Affiliation:

1. Tsuyama National College of Technology

Publisher

Japan Society of Mechanical Engineers

Subject

Industrial and Manufacturing Engineering,Mechanical Engineering,Mechanics of Materials

Reference7 articles.

1. 1) TANIKAWA T. Design of Two-Fingered Micro Hand and Its Application to Micro Manipulation. Journal of the Robotics Society of Japan. (1997) vol.15, no.2, p.284-289.

2. 2) NAMIKI A. Development of a Portable Assist Tool with Visual and Force Feedback. JSME Robotics and Mechatronics Conference, 2000. (2000)

3. 3) KAWAGOE K. Development of Seal-Like Precise Positioning Mechanism by Using Difference of Friction Foece (8th Report)-Application of AFM stage-. Proceedings of JSPE Spring Meeting, 2004. (2004) p.889-890.

4. 4) NOMURA K. Application of Electromagnetic Actuator using Rubber Film to Three-Degree-of-Freedom Precision Stage. Proceedings of the 2003 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM2003). (2003) p.101-106.

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