Micro-machined Micro Ion Source for Flexible and Concurrent MEMS Process(<Special Issue>The 1st Symposium on Micro-Nano Engineering)-Reference-Cited by-同舟云学术

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Micro-machined Micro Ion Source for Flexible and Concurrent MEMS Process(The 1st Symposium on Micro-Nano Engineering)

Published:2010 Issue:768 Volume:76 Page:1902-1904
ISSN:0387-5024
Container-title:Transactions of the Japan Society of Mechanical Engineers Series C
language:en
Short-container-title:Trans.JSME(C)

Author:

TAMONOKI Shinya,UEDA Tomoyuki,KUROTSU Masahiko,NAGASAWA Sumito¹,KUWANO Hiroki¹

Affiliation:

1. Department of Nanomechanics, Tohoku University

Publisher

Japan Society of Mechanical Engineers

Subject

Industrial and Manufacturing Engineering,Mechanical Engineering,Mechanics of Materials

Link

https://www.jstage.jst.go.jp/article/kikaic1979/76/768/76_KJ00006542663/_pdf

Reference7 articles.

1. 1) MCILRAITH A. A charged particle oscillator. Nature. (1966) vol.212, p.1422-1424.

2. 2) TAMONOKI S. Micro-machined micro ion source for flexible and concurrent process. Proceedings of IEEE MEMS Conference 2008. (2008) p.371-374.

3. 3) FRANKS J. Properties and applications of saddle-field ion source. J. Vacuum Science & Technology. (1979) vol.16, no.2, p.181-183.

4. 4) KUWANO H. Thin solid lubricant film formation by fast atom bombardment sputter deposition. Journal of Vacuum Science & Technology A3. (1985) vol.4, p.1809-1812.

5. 5) KUWANO H. Friction-reducing coatings by dual fast atom beam technique. Journal of Vacuum Science & Technology A4. (1986) vol.6, p.2993-2996.

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