Modification of borosilicate glass induced by ultraviolet laser illumination
Author:
Affiliation:
1. Department of Mechanical Engineering, Chiba University
Publisher
Japan Society of Mechanical Engineers
Subject
General Medicine
Link
https://www.jstage.jst.go.jp/article/mel/2/0/2_15-00686/_pdf
Reference12 articles.
1. Bellouard, Y., Said, A., Dugan, M. and Bado, P., Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching, Optics Express Vol.12, No.10 (2004), pp. 2120-2129.
2. Davis, K. M., Miura, K., Sugimoto, N. and Hirao, K., Writing waveguides in glass with a femtosecond laser, Opt. Lett. Vol.21, No.21 (1996), pp. 1729-1731.
3. Demos, S. G., Staggs, M. and Kozlowski, M. R., Investigation of processes leading to damage growth in optical materials for large-aperture lasers, Appl. Opt. Vol.41, No.18 (2002), pp. 3628-3633.
4. Gattass, R. R. and Mazur, E., Femtosecond laser micromachining in transparent materials, Nature Photonics Vol.2, No.4 (2008), pp. 219-225.
5. Hidai, H., Itoh, S., Tokura, H., Nagawasa, S. and Tachikawa, S., High-aspect-ratio Microdrilling with UV Laser Ablation. I - Drilling Holes with an Aspect-ratio of 190 in Borosilicate Glass- J. Jpn. Soc. Precis. Eng. Vol.76, No.10 (2010b), pp. 1161-1165.
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