1. Particulate Contamination and Microelectronics Manufacturing: An Introduction
2. (2) Fuchs, N.A., The Mechanics of Aerosol, (1964), Pergoman Press, London.
3. (3) Friedlander, S.K., Smokes, Dust, and Haze, (1977), John Wiley, New York.
4. (4) Hinds, W.C., Aerosol Technology, Properties Behavior, and Measurement of Airbone Particles, (1982), John Wiely and Sons, New York.
5. (5) Hedley, G.M., Aerosol, an Industrial and Environmental Science, (1984), Academic Press, New York.