CF4 Decomposition Using Low-Pressure Pulse-Modulated Radio Frequency Plasma-Reference-Cited by-同舟云学术

CF4 Decomposition Using Low-Pressure Pulse-Modulated Radio Frequency Plasma

Published:2005 Issue:3 Volume:48 Page:440-447
ISSN:1340-8054
Container-title:JSME International Journal Series B
language:en
Short-container-title:JSME international journal. Ser. B, Fluids and thermal engineering

Author:

KUROKI Tomoyuki¹,TANAKA Shingo²,OKUBO Masaaki¹,YAMAMOTO Toshiaki¹

Affiliation:

1. Department of Mechanical Engineering, Osaka Prefecture University

2. Sumitomo Chemical Co., Ltd.

Publisher

Japan Society of Mechanical Engineers

Subject

Fluid Flow and Transfer Processes,Physical and Theoretical Chemistry,Mechanical Engineering

Link

http://www.jstage.jst.go.jp/article/jsmeb/48/3/48_3_440/_pdf

Reference30 articles.

1. Warming Potential Reduction of C4F8Using Inductively Coupled Plasma

2. (2) Yamamoto, M., Li, Q., Nishioka, M. and Sadakata, M., Decomposition of CF₄ and C₂H₆ by Gas-Phase Ion-Molecule Reaction, 6th World Congress of Chemical Engineering, Melbourne, Australia, Sept., (2001), pp.23-27.

3. Single-stage plasma-chemical process for particulates, NO/sub x/, and SO/sub x/ simultaneous removal

4. Towards ideal NO/sub x/ control technology using a plasma-chemical hybrid process

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