Combining MEMS and AFM to examine surface strain effect on friction
Author:
Affiliation:
1. Department of Mechanical Systems Engineering, Tokyo University of Agriculture and Technology
2. National Institute of Advanced Industrial Science and Technology (AIST)
Publisher
Japan Society of Mechanical Engineers
Link
https://www.jstage.jst.go.jp/article/jamdsm/18/1/18_2024jamdsm0002/_pdf
Reference18 articles.
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2. Ando, Y., Development of three-dimensional electrostatic stages for scanning probe microscope, Sensors and Actuators A: Physical, Vol. 114, No. 2–3, (2004), pp. 285–291. DOI:10.1016/j.sna.2003.12.004.
3. Ando, Y., Ikehara, T. and Matsumoto, S., Design, fabrication and testing of new comb actuators realizing three-dimensional continuous motions, Sensors and Actuators, A: Physical, Vol. 97–98, (2002), pp. 579–586. DOI:10.1016/S0924-4247(01)00804-4.
4. Ando, Y., Ikehara, T. and Matsumoto, S., Development of three-dimensional microstages using inclined deep-reactive ion etching, Journal of Microelectromechanical Systems, Vol. 16, No. 3, (2007), pp. 613-621. DOI:10.1109/JMEMS.2006.885848.
5. Ando, Y. and Shiraishi, N., Development of a microlateral force sensor and its evaluation using lateral force microscopy., The Review of scientific instruments, Vol. 78, No. 3, (2007), p. 033701. DOI:10.1063/1.2714038.
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