On-machine form measurement of high precision ceramics parts by using a laser displacement sensor
Author:
Affiliation:
1. Department of Nanomechanics, Tohoku University
2. JAPAN FINE CERAMICS Co., LTD.
Publisher
Japan Society of Mechanical Engineers
Subject
Industrial and Manufacturing Engineering,Mechanical Engineering
Link
https://www.jstage.jst.go.jp/article/jamdsm/8/4/8_2014jamdsm0048/_pdf
Reference13 articles.
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2. Kuwata, T., Morita, N., Watanabe, T. and Yoshida, Y., Study on the Laser processing of the Covalent Bond-Ceramics (4th Report) -Analysis of the Deep Hole Processing-, Journal of the Japan Society for Precision Engineering, Vol.59, No. 11 (1993), pp. 1797-1802.
3. Moriwaki, T., Shamoto, E. and Inoue, K., Ultraprecision Ductile Cutting of Glass by Applying Ultrasonic Vibration, Annals of the CIRP, Vol. 4, No. 1 (1992), pp. 141-144.
4. Mou, J. and Richard, C.L., A method for enhancing the accuracy of CNC machine tools for on-machine inspection, Journal of Manufacturing Systems, Vol. 11 (1992) pp. 229-237.
5. Nakamoto, K., Linear Motor Drive Ultra Precision Machine using Ceramics made Aerostatic Guideway, Journal of the Japan Society for Precision Engineering, Vol. 72, No. 4 (2006) pp. 427-430.
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