1. (1) Esasi, M., Sensor for Measuring Acceleration, Microsensors (1994), pp. 332-58.
2. (2) Ikeda, K., Kuwayama, H., Kobayashi, T., Watanabe, T., Nishikawa, T., Yoshida, T. and Harada, K., Three Dimensional Micromachining of Silicon Pressure Sensor Integrating Resonant Strain Gauge on Diaphragm, Sensors and Actuators, A21-A23 (1990), pp. 1007-9.
3. CHARACTERIZATION OF A VALVELESS MICROPUMP BASED ON LIQUID VISCOSITY
4. (4) Massood Tabib-Azar, Microactuators (Kluwer Academic Publishers, 1998).
5. Theoretical and Experimental Analysis of Coupled Vibration of Microcantilever Array.