Critical Depth of Hard Brittle Materials on Nano Plastic Forming
Author:
Affiliation:
1. Department of Mechanical and Control Engineering, Tokyo Institute of Technology
2. Department of Mechanical Engineering, Indian Institute of Technology Delhi
3. Department of Mechanical Engineering, Tokyo Denki University
Publisher
Japan Society of Mechanical Engineers
Subject
Industrial and Manufacturing Engineering,Mechanical Engineering
Link
http://www.jstage.jst.go.jp/article/jamdsm/2/1/2_1_59/_pdf
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3. (3) S. Chow, P. Kraus, Nano imprinting lithography, Appl. Phys. Lett., 67, p3114. (1995)
4. Recent progress in nanoimprint technology and its applications
5. Scratching Test of Hard-Brittle Materials Under High Hydrostatic Pressure
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