Film Thickness Dependency of Interfacial Strength Evaluation for Thin Film Coating Structure by Nanoindentation Method
Author:
Affiliation:
1. Tokyo Institute of Technology
Publisher
Japan Society of Mechanical Engineers
Link
http://www.jstage.jst.go.jp/article/jmmp/4/6/4_6_771/_pdf
Reference10 articles.
1. (1)Kitmura, T., Sibutani, T. and Ueno, T., Development of evaluation method for interface strength between thin film and its application on delamination of Cu/TaN in an advanced LSI, Transactions of the Japan Society of Mechanical Engineers, Series A, Vol. 66, No.648(2000), pp.1568-1573
2. An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments
3. (3)Fischer-Cripps, A.C., Nanoindentation, Springer (2001)
4. (4)Lu, H., Wang, B., Ma, J., Huang. G., and Viswanathan, H., Measurement of creep compliance of solid polymers by nanoindentation, Mechanics of time-dependent materials, Vol.7, (2003),pp189-207
5. Measurement of adherence of residually stressed thin films by indentation. I. Mechanics of interface delamination
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