Tribological Properties of Amorphous Boron Nitride Films Prepared by Nanopulse Plasma CVD
Author:
Affiliation:
1. Tokyo Institute of Technology, Dept. of Mechanical Sci. and Eng.
2. JSPS Research Fellow
3. Nagoya University, Dept. of Materials, Physics and Energy Eng.
Publisher
Japan Society of Mechanical Engineers
Link
http://www.jstage.jst.go.jp/article/jmmp/3/2/3_2_217/_pdf
Reference29 articles.
1. Review of advances in cubic boron nitride film synthesis
2. (2) G. Poulachon, A. Moisan, and I. S. Jawahir., Tool-wear mechanisms in hard turning with polycrystalline cubic boron nitride tools, Wear, Vol. 250, p. 576, 2001.
3. Band-Edge Luminescence at Room Temperature of Boron Nitride Synthesized by Thermal Chemical Vapor Phase Deposition
4. Surface roughness of diamond-like carbon films prepared using various techniques
5. (5) S. Matsumoto and W. Zhang., High-rate deposition of high-quality, thick cubic boron nitride films by bias-assisted DC jet plasma chemical vapor deposition, Japanese Journal of Applied Physics Part 2, Vol. 39, p. L442, 2000.
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