Abstract
This article highlights that there is potential demand for microelectromechanical systems (MEMS) devices across a range of industries. In 2002, the five leading applications of MEMS will use 21.5 million disposable blood pressure sensors, 28.7 million manifold absolute pressure sensors for engines, 85 million packaged airbag accelerometers, 425 million inkjet printer heads, and a whopping 1.58 billion read/write magnetic heads for computer hard drives. In MEMS, process is driven by design, so it is important for companies seeking to commercialize a micro device to evaluate the capabilities of a foundry. Industry groups are starting to recognize standardization as an issue, and are focusing on fabrication. The MEMS Industry Group, a trade association based in Pittsburgh, identified standardization as a key challenge in its 2001 annual report. The Group plans to issue a report on foundries and fabrication sooner.
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