1. The State Key Laboratory of Tribology & Institute of Manufacturing Engineering, Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China;
2. Beijing Key Laboratory of Precision/Ultra-Precision Manufacturing Equipments and Control, Tsinghua University, Beijing 100084, China e-mail:
3. The State Key Laboratory of Tribology & Institute of Manufacturing Engineering, Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China e-mail:
4. Robot Phoenix, Shandong 250000, China e-mail: