1. School of Engineering, University of Birmingham, Edgbaston, Birmingham B15 2TT, UK e-mail:
2. Bio-Acoustic MEMS in Medicine (BAMM) Laboratory, School of Medicine, Stanford University, Palo Alto, CA 94304;
3. School of Engineering, University of Birmingham, Edgbaston B15 2TT, Birmingham, UK e-mail:
4. School of Engineering, University of Birmingham, Edgbaston, Birmingham B15 2TT, UK; Department of Mechanical Engineering, Khalifa University, P.O. Box 127788, Abu Dhabi, United Arab Emirates e-mail:
5. Laboratoire des Composants pour la Conversion de l'Energie (L2CE), Laboratoire d'Innovation pour les Technologies des Energies Nouvelles et des Nanomatériaux (LITEN), Commissariat á l'Energie Atomique et aux énergies alternatives (CEA), Grenoble 38054, France; CEA/LITEN, Laboratoire d'Innovation pour les Technologies des Energies Nouvelles et des nanomatériaux, Grenoble 38000, France e-mail:
6. Max Bergmann Center of Biomaterials, Leibniz Institute of Polymer Research Dresden, Dresden 01069, Germany e-mail: