Kinematic Synthesis of a D-Drive MEMS Device With Rigid-Body Replacement Method

Author:

Sanò Paolo1,Verotti Matteo2,Bosetti Paolo2,Belfiore Nicola P.3

Affiliation:

1. Department of Mechanical and Aerospace Engineering, Sapienza University of Rome, Rome 00184, Italy e-mail:

2. Department of Industrial Engineering, University of Trento, Povo 38123, Italy; ProM Facility, Trentino Sviluppo S.p.A., Rovereto 38068, Italy e-mail:

3. Department of Engineering, Universitá degli Studi Roma Tre, Rome 00146, Italy e-mail:

Abstract

In this paper, a microsystem with prescribed functional capabilities is designed and simulated. In particular, the development of a straight line path generator micro electro mechanical system (MEMS) device is presented. A new procedure is suggested for avoiding branch or circuit problems in the kinematic synthesis problem. Then, Ball's point detection is used to validate the obtained pseudo-rigid body model (PRBM). A compliant MEMS device is obtained from the PRBM through the rigid-body replacement method by making use of conjugate surfaces flexure hinges (CSFHs). Finally, the functional capability of the device is investigated by means of finite element analysis (FEA) simulations and experimental testing at the macroscale.

Publisher

ASME International

Subject

Computer Graphics and Computer-Aided Design,Computer Science Applications,Mechanical Engineering,Mechanics of Materials

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