A Comparison of Biaxial Bending Strength of Thin Silicon Dies in the Ball-on-Ring and PoEF Tests

Author:

Tsai M. Y.1,Kuo T. C.1

Affiliation:

1. Department of Mechanical Engineering, Chang Gung University , Taoyuan 333, Taiwan

Abstract

Abstract This paper aims to demonstrate the biaxial bending strength test on thin silicon dies using the classic ball-on-ring (BoR) test and discuss it in detail by comparing those results with the newly-proposed point load on elastic foundation (PoEF) test. The geometric linear and nonlinear solutions to the BoR test are reviewed and also provided with theoretical and numerical formulations, respectively. Three different thicknesses (t = 42 μm, 57 μm, and 82 μm) of the thin silicon dies (with a size of 10 mm × 10 mm) are tested in the BoR test, and their bending strengths, load–displacement curves and failure modes are presented and thoroughly discussed with a comparison of the published data from the PoEF test. It is found that, for the bending strengths of 57 μm and 82 μm-thick dies, the data from both the BoR and PoEF tests are very consistent, but not for 42 μm-thick dies with a relatively lower value in the BoR test. This lower strength value in the BoR test is attributed to the more pronounced local buckling effect than the PoEF test. Based on that, it can concluded that the PoEF test is better and more reliable than the conventional BoR as for testing the ultrathin silicon dies, even though both tests are identical for the regularly thin dies.

Funder

Ministry of Science and Technology, Taiwan

Publisher

ASME International

Subject

Electrical and Electronic Engineering,Computer Science Applications,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference18 articles.

1. Ultra-Thin Chips for High-Performance Flexible Electronics;Npj Flex Electron.,2018

2. Symmetrical Bending of Thin Circular Elastic Plates on Equally Spaced Point Supports;J. Res. Natl. Bur. Stand.,1967

3. Biaxial Flexure Test for Ceramics;Am. Ceram. Soc. Bull,1980

4. Ball-on-Ring Test Revisited;J. Am. Ceram. Soc,1989

Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号  京ICP备18003416号-3