1. Mechanical Automation Laboratory, Faculty of Engineering Technology, University of Twente, P.O. Box 217, Enschede 7500AE, The Netherlands e-mail:
2. Mechanical Automation Laboratory, Faculty of Engineering Technology, University of Twente, Enschede 7500AE, The Netherlands;
3. Demcon Advanced Mechatronics, Institutenweg 25, Enschede 7521PH, The Netherlands e-mail:
4. Mechanical Automation Laboratory, Faculty of Engineering Technology, University of Twente, P.O. Box 217, Enschede 7500AE, The Netherlands
5. MESA+ Institute for Nanotechnology, University of Twente, Enschede 7500AE, The Netherlands;
6. Bronkhorst High-Tech BV, Nijverheidsstraat 1A, Ruurlo 7261AK, The Netherlands
7. Applied Mechanics Laboratory, Faculty of Engineering Technology, University of Twente, P.O. Box 217, Enschede 7500AE, The Netherlands