Directional Pumping Performance of an Electrostatic Checkerboard Microvalve-Reference-Cited by-同舟云学术

Directional Pumping Performance of an Electrostatic Checkerboard Microvalve

Published:2006-01-01 Issue: Volume: Page:
ISSN:
Container-title:Microelectromechanical Systems
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Author:

Kim Hanseup¹,Astle Aaron A.¹,Bernal Luis P.¹,Najafi Khalil¹,Washabaugh Peter D.¹

Affiliation:

1. University of Michigan

Abstract

This paper reports experimental characterization of directional gas pumping generated by MEMS-fabricated checkerboard-type electrostatic microvalves. It is found that the oscillatory motion of the checkerboard microvalve membrane provides both the pumping and valve functions of a pump, namely: 1) to cause the volume displacement and, thus, compression and transfer of gas, and 2) to direct gas flow in one direction by closing and opening air paths in the proper sequence. Here, we describe the microvalve-only design, and report the pumping performance producing a maximum flow rate of 1.8 sccm and a maximum pressure differential of 3.0 kPa for five microvalves driven simultaneously with a sinusoidal signal of ± 100V amplitude at 5.5 kHz.

Publisher

ASMEDC

Link

http://asmedigitalcollection.asme.org/IMECE/proceedings-pdf/doi/10.1115/IMECE2006-16211/2781817/557_1.pdf

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