Modified Weibull Failure Theory for Size Effect Prediction of Brittle Thin Film-Reference-Cited by-同舟云学术

Modified Weibull Failure Theory for Size Effect Prediction of Brittle Thin Film

Published:2006-01-01 Issue: Volume: Page:
ISSN:
Container-title:Materials, Nondestructive Evaluation, and Pressure Vessels and Piping
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Author:

Khandaker M.¹,Dhorje M.¹,Ekwaro-Osire S.²

Affiliation:

1. Texas Tech University

2. TexasLubbock, TX Tech University

Abstract

A brittle thin film bonded to a substrate is common in MEMS components. At the edge of the interface, high stress gradients exist. It has been observed that mechanical strengthening of the thin film with decreasing film size occurs due to two constraints, namely, the microstructural constraint and the geometrical constraint. Consideration of both these constraints is required to properly predict the size effect impact on the strength of a brittle thin film. In this paper, a statistical approach is developed to predict the size effect of a brittle thin film on a substrate.

Publisher

ASMEDC

Link

http://asmedigitalcollection.asme.org/IMECE/proceedings-pdf/doi/10.1115/IMECE2006-14926/4565978/557_1.pdf

Reference18 articles.

1. Andersens J., J. , 2005, “Advanced fragmentation stage of oxide coating on polymer substrate under biaxial tension,” Thin Solid Films, 471(1), pp. 209–217.

2. Wisnom M. R. , 1999, “Size effects in the testing of fibre-composite materials,” Compos. Sci. Technol., 59(13), pp. 1937–1957.

3. Haque M. A. , and SaifM. T. A., 2003, “Strain gradient effect in nanoscale thin films,” Acta Materialia, 51(11), pp. 3053–3061.

4. Arzt E. , 1998, “Size effects in materials due to microstructural and dimensional constraints: A comparative review,” Acta Materialia, 46(16), pp. 5611–5626.

5. Tsuchiya T. , TabataO., SakataJ., and TagaY., 1998, “Specimen size effect of tensile strength of surface- micromachined polycrystalline silicon thin films,” J. Microelectromech. Syst., 7(1), pp. 106–113.