Microstructure and Mechanical Properties of Sputter-Deposited Ti-Ni Alloy Thin Films-Reference-Cited by-同舟云学术

Microstructure and Mechanical Properties of Sputter-Deposited Ti-Ni Alloy Thin Films

Published:1999-01-01 Issue:1 Volume:121 Page:2-8
ISSN:0094-4289
Container-title:Journal of Engineering Materials and Technology
language:en
Short-container-title:

Author:

Ishida A.¹,Miyazaki S.²

Affiliation:

1. National Research Institute for Metals, Tsukuba, Ibaraki 305-0047, Japan

2. Institute of Materials Science, University of Tsukuba, Tsukuba, Ibaraki 305-8573, Japan

Abstract

The shape memory effect, superelasticity and two-way shape memory effect of Ni-rich Ti-Ni sputter-deposited thin films were evaluated quantitatively. The results indicated that they are almost comparable to those of bulk specimens. On the other hand, Ti-rich Ti-Ni thin films were found to exhibit a good shape memory behavior owing to a peculiar fine microstructure unlike bulk specimens. Addition of Cu or Pd to a Ti-50at.%Ni thin film was also confirmed to improve the shape memory behavior. These results suggest that shape memory thin films are a promising material for microactuators.

Publisher

ASME International

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Link

http://asmedigitalcollection.asme.org/materialstechnology/article-pdf/121/1/2/5879854/2_1.pdf

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