1. Department of Mechanical Engineering, National Cheng Kung University, Tainan City, 701, Taiwan, China
2. Department of Aircraft Engineering, Air Force Institute of Technology, Kaohsiung, 820, Taiwan, China
3. Department of Power Mechanical Engineering and Centre of MEMS Design and Application, Formosa University, Yunlin, 63208, Taiwan, China
4. Hiwin Technologies Corp., No. 46, 37th Road, Taichung Industrial Park, Taichung, 40768, Taiwan, China
5. Department of Mechanical Engineering, National Cheng Kung University, Tainan City, 701, Taiwan, China e-mail: