1. Centre for Precision Technologies, University of Huddersfield, Huddersfield HD1 3DH, UK; School of Mechatronics Engineering, Harbin Institute of Technology, Harbin 150001, China; Haslett Building (HA3/05) EPSRC Future Metrology Hub, University of Huddersfield, Huddersfield HD1 3DH, UK e-mail:
2. School of Mechatronics Engineering, Harbin Institute of Technology, No.92 West Dazhi Street, Harbin 150001, China e-mail:
3. Centre of Micro/Nano Manufacturing Technology (MNMT-Dublin), University College Dublin, Dublin 4, Ireland e-mail:
4. Mechanical Engineering, School of Engineering, Newcastle University, Newcastle upon Tyne, NE1 7RU, UK e-mails: ;
5. School of Mechatronics Engineering, Army Aviation Institute, No.42 Tongzhou Street, Beijing 101123, China e-mail: