Shaping Silicon Nitride With a Carbon Dioxide Laser by Overlapping Multiple Grooves-Reference-Cited by-同舟云学术

Shaping Silicon Nitride With a Carbon Dioxide Laser by Overlapping Multiple Grooves

Published:1989-11-01 Issue:4 Volume:111 Page:315-321
ISSN:0022-0817
Container-title:Journal of Engineering for Industry
language:en
Short-container-title:

Author:

Wallace R. J.¹,Copley S. M.²

Affiliation:

1. Lawrence Livermore National Laboratory, P.O. Box 808, Mail Code L-482, Livermore, CA 94550

2. Materials Science and Mechanical Engineering Departments, University of Southern California, Los Angeles, CA 90089-0241

Abstract

In this research, the feasibility of shaping Si3N4 by overlapping multiple grooves produced with a continuously operated CO2 laser beam is demonstrated. The relationships of process parameters such as material removal rate and arithmetic average surface roughness to machine parameters such as feed and speed have been investigated. Strategies for laser shaping are discussed and an economic evaluation of laser shaping is presented.

Publisher

ASME International

Subject

General Medicine

Link

http://asmedigitalcollection.asme.org/manufacturingscience/article-pdf/111/4/315/6506467/315_1.pdf

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